半導體設備零件維修保養
維修保養及清潔流程
Parts Overhaul Flow Chart
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Parts Overhaul
1. Stage Heater
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2. AUDIO Board
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3. Others
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TEL Trais Stage Heater
Varian Implementer AUDIO Board
Others
VALVE (Buschjost Gmbh、PH、Metro、ISO MKS、VAT、SMC)
機台chamber確認窗、研磨轉盤、放大器、黃光遮光板、晶圓座
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